CHIM IND INORG processi industriali via plasma

ESSAY PPaP plasma intro.pdf

JPhysD plasma roadmap 2017.pdf

1 INTRODUZIONE PLASMI.pdf

PPaP - 2022 - Oehr - Industrial plasma applications.pdf

Weltmann et al, consensus, PPaP 2019.pdf

2 FUNDAMENTALS OF PLASMAS.pdf

3 REACTORS & PROCESSES.pdf

jvst_etch_rev_Donnely 2013.pdf

4 PLASMA in INDUSTRY.pdf